Inductively coupled plasma etching of silicon /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2002.
|
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Physical Description: | xiii, 126 leaves : ill. ; 30 cm. |
|---|---|
| Bibliography: | Bibliography: leaves 111-126. |