Kok, K. (2002). Techniques of etching high aspect ratio trenches for mems applications.
Chicago Style (17th ed.) CitationKok, Kitt-Wai. Techniques of Etching High Aspect Ratio Trenches for Mems Applications. 2002.
MLA (8th ed.) CitationKok, Kitt-Wai. Techniques of Etching High Aspect Ratio Trenches for Mems Applications. 2002.
Warning: These citations may not always be 100% accurate.