APA (7th ed.) Citation

Kok, K. (2002). Techniques of etching high aspect ratio trenches for mems applications.

Chicago Style (17th ed.) Citation

Kok, Kitt-Wai. Techniques of Etching High Aspect Ratio Trenches for Mems Applications. 2002.

MLA (8th ed.) Citation

Kok, Kitt-Wai. Techniques of Etching High Aspect Ratio Trenches for Mems Applications. 2002.

Warning: These citations may not always be 100% accurate.