APA (7th ed.) Citation

Shi, J. (2002). ICP etching and structural characterization of amorphous silicon carbide.

Chicago Style (17th ed.) Citation

Shi, Jing. ICP Etching and Structural Characterization of Amorphous Silicon Carbide. 2002.

MLA (8th ed.) Citation

Shi, Jing. ICP Etching and Structural Characterization of Amorphous Silicon Carbide. 2002.

Warning: These citations may not always be 100% accurate.