Computer simulation of silicon nitride deposition in PECVD reactors using SiCl4/NH3/Ar mixtures as precursors /

Computer simulation of silicon nitride deposition in PECVD reactors using SiCl4/NH3/Ar mixtures as precursors /

محفوظ في:

التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Xu, Yunhua
التنسيق:	أطروحة كتاب
اللغة:	English
منشور في:	2002.
الوسوم:	إضافة وسم لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!

مواد مشابهة

Effect of annealing on direct current and pulse PECVD hydrogenated amorphous silicon /
بواسطة: Lim, Seck Chai
منشور في: (2004)

Bismuth titanate and strontium bismuth titanate from mechanical activation of mixed oxides and coprecipitated precursor /
بواسطة: Ng, Szu Hwee
منشور في: (2001)

STM investigation of Si magic cluster /
بواسطة: Lee, Justina Sze Ying
منشور في: (2000)

Synthesis and characterization of RF-PECVD carbon nitride thin films /
بواسطة: Lim, Shuang Fang
منشور في: (1999)

Thermal behavior of tantalum-based diffusion barriers in Cu/Si metallization /
بواسطة: Liu, Ling
منشور في: (1999)

Electroless polyol deposition of iron-nickel thin films /
بواسطة: Yin, Hong
منشور في: (2001)

Xps, ups and molecular orbital calculation studies of covalent bonding of nitriles on SI(100)-2x1 surface /
بواسطة: Wan Luan Yie
منشور في: (2000)

Morphologies and structures of hydrogen-terminated SI (111) surfaces studied by scanning tunneling microscopy and attenuated total reflection FTIR spectroscopy /
بواسطة: Li, Jing
منشور في: (2001)

Plasma enhanced chemical vapour deposition of carbon nitride films from ethane and nitrogen gas mixtures /
بواسطة: Maisara Othman
منشور في: (2012)

Structural properties of hydrogenated amorphous silicon (A-SI:H) thin film grown via radio frequency plasma enhanced chemical vapor deposition (RF PECVD)
بواسطة: Anthony Hasbi, Hasbullah
منشور في: (2005)

Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /
بواسطة: Mitani, Sufian Mousa Ibrahim
منشور في: (2004)

UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
بواسطة: Ab. Rahman, Nur Alifah
منشور في: (2010)

Deposition and characterization of germanium nitride film using different thermal nitridation temperature /
بواسطة: Low, Yan Jie
منشور في: (2018)

Nitridation and growth of titanium thin films on SI (100) /
بواسطة: Siew, Hueh Ling
منشور في: (1998)

Optimization of vhf-pecvd deposition parameters for silicon carbide film using in-situ and in-line gas phase analysis
بواسطة: Azali, Muhamad Muizzudin
منشور في: (2022)

Pulsed laser deposition of titanium nitride thin film /
بواسطة: Wang, Haidan
منشور في: (2000)

Pecvd hydrogenated amorphous carbon films : growth and characterization /
بواسطة: Rozidawati Awang
منشور في: (2008)

PECVD hydrogenated amorphous carbon films : growth and characterization /
بواسطة: Rozidawati Awang
منشور في: (2008)

Effect of catalysts and precursors in the synthesis of carbon nanotubes by catalytic chemical vapour deposition
بواسطة: Sulaiman, Yusran
منشور في: (2006)

Fabrication Of Gallium Nitride Nanowires Via Chemical Vapour Deposition
بواسطة: Low, Li Li
منشور في: (2012)

Wear Behaviour of Filtered-Arc Deposited Titanium Nitride Coatings
بواسطة: Amir, Norlaili
منشور في: (2006)

Deposition and characterization of nitride thin films by laser ablation technique /
بواسطة: Goh Yeow Whatt
منشور في: (2002)

Investigation on the performance of tetraglyme-based solid copolymer electrolytes for solid-state electrical double layer capacitors (EDLCs) /
بواسطة: Sharmilah Sinasamy
منشور في: (2021)

Non-selective area doping of rare-earth material with co-doping /
بواسطة: Yap, Yen
منشور في: (2009)

Reflective and beam-through types of fiber optic sensor for displacement measurement /
بواسطة: al-Masri, Walaa Fawzi
منشور في: (2010)

Monolithic integration of glass-based optical devices via solution doping of erbium rare-earth material /
بواسطة: Kow, Siew Ting
منشور في: (2009)

Mechanical and thermodynamic properties of bacteriorhodopsin langmuir film /
بواسطة: Vijayandren Kuppusamy
منشور في: (2010)

Synthesis and characterisation of Zn(II), Cu(II), Ni(II) and Co(II) complexes as molecular spintronic materials /
بواسطة: Tee, Jia Ti
منشور في: (2011)

Production of multiwall carbon nanotube for alcohol sensor application /
بواسطة: Alshaqaq, Ebtehal Saleh
منشور في: (2010)

Pembangunan kaedah pencirian sifat mekanikal bahan berasaskan sensor film piezo /
بواسطة: Mohd Irman Ramli

Characteristics of polyacrylonitrile pan-based polymer electrolytes for battery applications /
بواسطة: Chong, Woon Gie
منشور في: (2013)

Preparation and characterization of hybrid organic-inorganic nano composite coating /
بواسطة: Shafaamri, Ammar
منشور في: (2015)

Studies on the growth, structural and electrical properties of silicon-based heterostructure nanowires /
بواسطة: Guanghan, Qian
منشور في: (2015)

Synthesis of stilbenes for potential application as photoacid generators in polymer film modification /
بواسطة: Lee, Jia Yin
منشور في: (2015)

Evaluation on the properties of organic coatings using dynamic corrosion testing system /
بواسطة: Aliero, Yusuf Basiru
منشور في: (2016)

Synthesis and characterization of graphene nanoplatelets (GNPs) /
بواسطة: Nur Izzati Iskandar zulkarnain
منشور في: (2016)

Pure and doped zinc oxide nanostructures for photodegradation of methylene blue /
بواسطة: Nur Saidah Abd Razak
منشور في: (2016)

Evaluation of natural radioactivity and hazard indices in the soil collected from the residential college areas of University Malaya, Malaysia /
بواسطة: Nneji, Okereafor Casmir
منشور في: (2017)

An assessment of heavy metals in poultry chicken giblets using ICP-MS /
بواسطة: Chijioke, Nwokoma Oliver
منشور في: (2017)

Corrosion of porous titanium /
بواسطة: Chooi, Serene Kit Meng
منشور في: (2001)

Services hosted by the Perpustakaan Sultan Abdul Samad, Universiti Putra Malaysia with Cooperation MySyL Group