Application of NH4F chemistry for the pre-gate oxidation cleaning process /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2002.
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| LEADER | 00719nam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | u518644 | ||
| 003 | SIRSI | ||
| 008 | 031108s2002 si v 00 1 eng m | ||
| 035 | |a ACZ-7048 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUS 2002 Teo | ||
| 100 | 1 | 0 | |a Teo, Eric Yeow Hwee |
| 245 | 1 | 0 | |a Application of NH4F chemistry for the pre-gate oxidation cleaning process / |c Teo Yeow Hwee Eric. |
| 260 | |c 2002. | ||
| 300 | |a viii, 94 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- National University of Singapore, 2002. | ||
| 504 | |a Bibliography: leaves 88-92. | ||
| 948 | |a 13/11/2003 |b 13/11/2003 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUS 2002 TEO |w LC |c 1 |i A511145316 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 21/11/2003 |o .PUBLIC. BKOM 4 : 45987 | ||