Characterization of polished silicon wafer /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2003.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/2048 |
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| Physical Description: | [vi], 155 leaves : ill. ; 30 cm. |
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| Bibliography: | Bibliography : leaves 139-142. |