Characterization of polished silicon wafer /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2003.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/2048 |
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| 001 | u520178 | ||
| 003 | SIRSI | ||
| 008 | 790926s2002 my a t 00 10 eng m | ||
| 035 | |a ADA-3024 | ||
| 040 | |a UMM | ||
| 090 | |a TA403 |b UM 2002 Raj | ||
| 100 | 0 | 0 | |a Rajan Subramaniam |
| 245 | 1 | 0 | |a Characterization of polished silicon wafer / |c by Rajan Subramaniam. |
| 260 | 0 | |c 2003. | |
| 300 | |a [vi], 155 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Tech. (Material Sc.)) -- Institut Pengajian Siswazah dan Penyelidikan, Universiti Malaya, 2003. | ||
| 504 | |a Bibliography : leaves 139-142. | ||
| 650 | 0 | |a Semiconductor wafers. | |
| 650 | 0 | |a Silicon. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Institut Pengajian Siswazah dan Penyelidikan. |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/2048 |
| 948 | |a 13/02/2004 |b 25/06/2004 | ||
| 596 | |a 1 | ||
| 999 | |a TA403 UM 2002 RAJ |w LC |c 1 |i A511375372 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 18/6/2004 | ||