Studies on in-lens deflection systems for scanning electron-beam instruments /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2000.
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| Subjects: | |
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| LEADER | 00861cam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | u691281 | ||
| 003 | SIRSI | ||
| 008 | 000929s2000 si v 00 10 eng m | ||
| 035 | |a ACV-5068 | ||
| 040 | |a UMM | ||
| 090 | |a TK7 |b NUSP 2000 Zha | ||
| 100 | 1 | 0 | |a Zhao, Yan. |
| 245 | 1 | 0 | |a Studies on in-lens deflection systems for scanning electron-beam instruments / |c Zhao Yan. |
| 260 | |c 2000. | ||
| 300 | |a xvi, 129 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- Dept. of Electrical Engineering, Faculty of Engineering, National University of Singapore, 2000. | ||
| 504 | |a Bibliography: leaves 108-112. | ||
| 650 | 0 | |a Scanning electron microscopes. | |
| 650 | 0 | |a Light deflectors. | |
| 948 | |a 22/08/2002 |b 21/05/2004 | ||
| 596 | |a 1 | ||
| 999 | |a TK7 NUSP 2000 ZHA |w LC |c 1 |i A510763436 |d 10/7/2006 |f 10/7/2006 |g 1 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 14/2/2005 |o .PUBLIC. BKOM 4 :43094 | ||