APA (7th ed.) Citation

Chen, S. (2001). Laser-induced formation of titanium silicides and its applications in deep sub-micron technology.

Chicago Style (17th ed.) Citation

Chen, Shaoyin. Laser-induced Formation of Titanium Silicides and Its Applications in Deep Sub-micron Technology. 2001.

MLA (8th ed.) Citation

Chen, Shaoyin. Laser-induced Formation of Titanium Silicides and Its Applications in Deep Sub-micron Technology. 2001.

Warning: These citations may not always be 100% accurate.