Ultra shallow secondary ion mass spectrometric studies on semiconductors /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2001.
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| Subjects: | |
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| LEADER | 00852cam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | u691932 | ||
| 003 | SIRSI | ||
| 008 | 021118s2001 si a v 00 10 eng m | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b NUSP 2001 Ng | ||
| 100 | 1 | 0 | |a Ng, Chee Mang. |
| 245 | 1 | 0 | |a Ultra shallow secondary ion mass spectrometric studies on semiconductors / |c Ng Chee Mang. |
| 260 | |c 2001. | ||
| 300 | |a iv, 125 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- Dept. of Physics, Faculty of Science, National University of Singapore, 2001. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Semiconductors |x Characterization. | |
| 650 | 0 | |a Secondary ion mass spectrometry |x Testing. | |
| 948 | |a 18/11/2002 |b 22/07/2004 | ||
| 596 | |a 1 | ||
| 999 | |a QC3 NUSP 2001 NG |w LC |c 1 |i A510948844 |d 22/8/2005 |f 22/8/2005 |g 2 |l B_KOM4 |m P01UTAMA |r Y |s Y |t TESIS |u 17/8/2005 |o .PUBLIC. BKOM 4 :44443 | ||