rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Electrical characterization of bulk traps and interface traps in the fully-depleted SOI MOSFET
  name:
    name part: Lun, Zhao.
    role:
      role term: creator
  type of resource: text
  genre: legal case and case notes
  origin info:
    place:
      place term: si
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xviii, [165] leaves : ill. ; 30 cm.
  note: Lun Zhao.
  note: Thesis (Ph.D.) -- Dept. of Electrical & Computer Engineering, Faculty of Engineering, National University of Singapore, 2002.
  note: Includes bibliographical references.
  subject:
    topic: Silicon-on-insulator technology
  subject:
    topic: Metal oxide semiconductor field-effect transistors
  record info:
    record content source: UMM
    record creation date: 040412
    record identifier: u695443