Deposition of diamond and diamondlike carbon films using RF plasma /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2004.
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| Subjects: | |
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| 001 | u697884 | ||
| 003 | SIRSI | ||
| 008 | 040825s2004 my a t 00 1 eng m | ||
| 035 | |a ADC-3452 | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UM 2004 Tan | ||
| 100 | 1 | 0 | |a Tan, Chian Hong. |
| 245 | 1 | 0 | |a Deposition of diamond and diamondlike carbon films using RF plasma / |c Tan Chian Hong. |
| 260 | |c 2004. | ||
| 300 | |a vi, 124 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2004. | ||
| 504 | |a Bibliography: leaves 113-114. | ||
| 650 | 0 | |a Diamond thin films. | |
| 650 | 0 | |a Plasma diagnostics. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik. |
| 948 | |a 25/08/2004 |b 25/09/2004 | ||
| 596 | |a 1 | ||
| 999 | |a QC3 UM 2004 TAN |w LC |c 1 |i A511668289 |d 10/8/2006 |f 10/8/2006 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 10/8/2006 | ||