Hydrogenated amorphous silicon prepared by d.c. plasma enhanced chemical vapour deposition of helium diluted silane /

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Bibliographic Details
Main Author: Roszairi Haron
Format: Thesis Book
Language:English
Published: 2004.
Subjects:
Online Access:http://studentsrepo.um.edu.my/id/eprint/1613
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Description
Physical Description:xii, 160 leaves : ill. ; 30 cm.
Bibliography:Includes bibliographical references.