Hydrogenated amorphous silicon prepared by d.c. plasma enhanced chemical vapour deposition of helium diluted silane /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2004.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/1613 |
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| 001 | u711412 | ||
| 003 | SIRSI | ||
| 008 | 050905s2004 my t 000 0 eng m | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UM 2004 Rosh | ||
| 100 | 0 | 0 | |a Roszairi Haron |
| 245 | 1 | 0 | |a Hydrogenated amorphous silicon prepared by d.c. plasma enhanced chemical vapour deposition of helium diluted silane / |c Roszairi bin Haron. |
| 260 | |c 2004. | ||
| 300 | |a xii, 160 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2004. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition. | |
| 650 | 0 | |a Amorphous semiconductors |x Optical properties | |
| 650 | 0 | |a Amorphous semiconductors |x Electric properties. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/1613 |
| 596 | |a 1 | ||
| 999 | |a QC3 UM 2004 ROSH |w LC |c 1 |i A511765521 |d 27/9/2005 |f 27/9/2005 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 21/9/2005 | ||