Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMS /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | Malay |
| Published: |
2006.
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| Subjects: | |
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| Physical Description: | xxiii, 290 leaves : ill. (some col.) ; 30 cm. |
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| Bibliography: | Bibliography: p. 236-243. |