Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMS /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | Malay |
| Published: |
2006.
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| LEADER | 00963cam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | u721475 | ||
| 003 | SIRSI | ||
| 008 | 060425s2006 my a v 000 0 may m | ||
| 040 | |a UMM | ||
| 090 | |a TK7875 |b Nors | ||
| 100 | 0 | 0 | |a Norhayati Soin |
| 245 | 1 | 0 | |a Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMS / |c Norhayati binti Soin. |
| 260 | |c 2006. | ||
| 270 | 1 | |g Norhayati Soin. |a Universiti Malaya. Fakulti Kejuruteraan elektrik. | |
| 300 | |a xxiii, 290 leaves : |b ill. (some col.) ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) -- Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, 2006. | ||
| 504 | |a Bibliography: p. 236-243. | ||
| 650 | 0 | |a Microelectromechanical systems |x Design and construction. | |
| 650 | 0 | |a Diaphragms (Mechanical devices) |x Design and construction. | |
| 650 | 0 | |a Diaphragms (Structural engineering) | |
| 596 | |a 1 | ||
| 999 | |a TK7875 NORS |w LC |c 1 |i A512622585 |d 6/12/2016 |e 6/12/2016 |f 25/8/2006 |g 1 |l STACKS |m P01UTAMA |n 2 |r Y |s Y |t TESIS |u 25/8/2006 | ||