Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMS /

Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMS /

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書目詳細資料
主要作者:	Norhayati Soin
格式:	Thesis 圖書
語言:	Malay
出版:	2006.
主題:	Microelectromechanical systems > Design and construction. Diaphragms (Mechanical devices) > Design and construction. Diaphragms (Structural engineering)
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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