Effect of annealing on direct current and pulse PECVD hydrogenated amorphous silicon /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2004.
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| Subjects: | |
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| Physical Description: | [xiii], 139 leaves : ill. ; 30cm |
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| Bibliography: | Bibliography: leaves 130-134. |