Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2004.
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| Subjects: | |
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| Item Description: | Supervised by Prof. Dr. Saadah A. Rahman. |
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| Physical Description: | xix, 248 leaves : ill. ; 30 cm. |
| Bibliography: | Bibliography: leaves 201-202. |