Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2004.
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| LEADER | 01037cam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | u725731 | ||
| 003 | SIRSI | ||
| 005 | 200608081448 | ||
| 008 | 060808s2004 my t 000 0 eng m | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UMP 2004 Mit | ||
| 100 | 1 | 0 | |a Mitani, Sufian Mousa Ibrahim |
| 245 | 1 | 0 | |a Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : |b preparation and characterization / |c by Sufian Mousa Ibrahim Mitani. |
| 260 | |c 2004. | ||
| 300 | |a xix, 248 leaves : |b ill. ; |c 30 cm. | ||
| 500 | |a Supervised by Prof. Dr. Saadah A. Rahman. | ||
| 502 | |a Thesis (Ph.D.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2005. | ||
| 504 | |a Bibliography: leaves 201-202. | ||
| 650 | 0 | |a Amorphous semiconductors. | |
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition. | |
| 650 | 0 | |a Silicon nitride. | |
| 710 | 2 | 0 | |a Universiti Malaya. |b Jabatan Fizik. |
| 596 | |a 1 | ||
| 999 | |a QC3 UMP 2004 MIT |w LC |c 1 |i A511939745 |d 22/8/2006 |f 22/8/2006 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 22/8/2006 | ||