Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /

Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /

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書目詳細資料
主要作者:	Mitani, Sufian Mousa Ibrahim
格式:	Thesis 圖書
語言:	English
出版:	2004.
主題:	Amorphous semiconductors. Plasma-enhanced chemical vapor deposition. Silicon nitride.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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