Time & temperature optimization for iron-boron pair (Fe-B) dissociation in silicon wafers by surface photovoltage (SPV) method /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2006.
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| Subjects: | |
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| Physical Description: | ix, 67, A4, B4, C43 leaves : ill. ; 30 cm. |
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| Bibliography: | Bibliography: leaves 65-67. |