A study of deposited (Ti[1-X]A1[X]) N thin film by reactive magnetron sputtering /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2006.
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| Subjects: | |
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| Item Description: | [1-X] [X] are subscripts. |
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| Physical Description: | xii, 63 leaves : ill. ; 30 cm. |
| Bibliography: | Bibliography: leaves 60-63. |