A study of deposited (Ti[1-X]A1[X]) N thin film by reactive magnetron sputtering /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2006.
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| LEADER | 01131cam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | u750033 | ||
| 003 | SIRSI | ||
| 005 | 200712311000 | ||
| 008 | 071231s2006 my a t 000 0 eng m | ||
| 040 | |a UMM |d UMJ | ||
| 090 | |a TS176 |b UM 2006 Mohamd | ||
| 097 | |a TS176 |b UM 2006 Mohamd | ||
| 100 | 0 | |a Mohd Azaman Md Deros. | |
| 245 | 1 | 2 | |a A study of deposited (Ti[1-X]A1[X]) N thin film by reactive magnetron sputtering / |c Mohd Azaman Md Deros. |
| 260 | |c 2006. | ||
| 300 | |a xii, 63 leaves : |b ill. ; |c 30 cm. | ||
| 500 | |a [1-X] [X] are subscripts. | ||
| 502 | |a Dissertation (M.Eng.(Manuf.)) -- Jabatan Kejuruteraan Rekabentuk dan Pembuatan, Fakulti Kejuruteraan, Universiti Malaya, 2007. | ||
| 504 | |a Bibliography: leaves 60-63. | ||
| 650 | 0 | |a Thin films |x Magnetic properties. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Kejuruteraan Rekabentuk dan Pembuatan. | |
| 900 | |a ND, MS-ZA | ||
| 596 | |a 1 7 | ||
| 999 | |a TS176 UM 2006 MOHAMD |w LC |c 1 |i A513118119 |d 4/7/2008 |f 4/7/2008 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 30/6/2008 | ||
| 999 | |a TS176 UM 2006 MOHAMD |w LC |c 1 |i A513003411 |d 18/8/2008 |f 18/8/2008 |g 1 |l STACKS |m P07JURUTER |r Y |s Y |t TESIS |u 14/8/2008 | ||