Development of a planar coil radio frequency inductively coupled plasma system for material processing /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2008.
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| Subjects: | |
| Online Access: | http://dspace.fsktm.um.edu.my/handle/1812/490 |
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| LEADER | 01015cam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | u784529 | ||
| 003 | SIRSI | ||
| 005 | 201001121555 | ||
| 008 | 100112s2008 my t 000 0 eng m | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UMP 2008 Ng | ||
| 100 | 1 | |a Ng, Kim Hooi. | |
| 245 | 1 | 0 | |a Development of a planar coil radio frequency inductively coupled plasma system for material processing / |c Ng Kim Hooi. |
| 260 | |c 2008. | ||
| 300 | |a xii, 439 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D.) - Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2009. | ||
| 504 | |a Bibliography: leaves 410-439. | ||
| 650 | 0 | |a Planar transistors. | |
| 650 | 0 | |a Electric coils. | |
| 650 | 0 | |a Inductively coupled plasma atomic emission spectrometry. | |
| 650 | 0 | |a Radio frequency. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik | |
| 856 | 4 | 1 | |u http://dspace.fsktm.um.edu.my/handle/1812/490 |
| 900 | |a ZSA-ZA | ||
| 596 | |a 1 | ||
| 999 | |a QC3 UMP 2008 NG |w LC |c 1 |i A513732175 |d 28/1/2010 |f 28/1/2010 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 27/1/2010 | ||