Development of a planar coil radio frequency inductively coupled plasma system for material processing /

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Bibliographic Details
Main Author: Ng, Kim Hooi
Format: Thesis Book
Language:English
Published: 2008.
Subjects:
Online Access:http://dspace.fsktm.um.edu.my/handle/1812/490
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040 |a UMM 
090 |a QC3  |b UMP 2008 Ng 
100 1 |a Ng, Kim Hooi. 
245 1 0 |a Development of a planar coil radio frequency inductively coupled plasma system for material processing /  |c Ng Kim Hooi. 
260 |c 2008. 
300 |a xii, 439 leaves :  |b ill. ;  |c 30 cm. 
502 |a Thesis (Ph.D.) - Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2009. 
504 |a Bibliography: leaves 410-439. 
650 0 |a Planar transistors. 
650 0 |a Electric coils. 
650 0 |a Inductively coupled plasma atomic emission spectrometry. 
650 0 |a Radio frequency. 
710 2 |a Universiti Malaya.  |b Jabatan Fizik 
856 4 1 |u http://dspace.fsktm.um.edu.my/handle/1812/490 
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