Development of a planar coil radio frequency inductively coupled plasma system for material processing /

Development of a planar coil radio frequency inductively coupled plasma system for material processing /

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書目詳細資料
主要作者:	Ng, Kim Hooi
格式:	Thesis 圖書
語言:	English
出版:	2008.
主題:	Planar transistors. Electric coils. Inductively coupled plasma atomic emission spectrometry. Radio frequency.
在線閱讀:	http://dspace.fsktm.um.edu.my/handle/1812/490
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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