PECVD hydrogenated amorphous carbon films : growth and characterization /

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Bibliographic Details
Main Author: Rozidawati Awang
Format: Thesis Book
Language:English
Published: 2008.
Subjects:
Online Access:http://dspace.fsktm.um.edu.my/handle/1812/599
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Description
Physical Description:xx, 184 leaves : ill. ; 30 cm.
Bibliography:Bibliography: leaves 163-174.