PECVD hydrogenated amorphous carbon films : growth and characterization /
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Main Author: | |
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Format: | Thesis Book |
Language: | English |
Published: |
2008.
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Subjects: | |
Online Access: | http://dspace.fsktm.um.edu.my/handle/1812/599 |
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Physical Description: | xx, 184 leaves : ill. ; 30 cm. |
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Bibliography: | Bibliography: leaves 163-174. |