PECVD hydrogenated amorphous carbon films : growth and characterization /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2008.
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| Subjects: | |
| Online Access: | http://dspace.fsktm.um.edu.my/handle/1812/599 |
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|---|---|---|---|
| 001 | u785411 | ||
| 003 | SIRSI | ||
| 005 | 200501251555 | ||
| 008 | 100125s2008 my t 000 0 eng m | ||
| 040 | |a UMM | ||
| 090 | |a QC3 |b UMP 2008 Roza | ||
| 100 | 0 | |a Rozidawati Awang. | |
| 245 | 1 | 0 | |a PECVD hydrogenated amorphous carbon films : |b growth and characterization / |c Rozidawati Awang. |
| 260 | |c 2008. | ||
| 300 | |a xx, 184 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Thesis (Ph.D) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2009. | ||
| 504 | |a Bibliography: leaves 163-174. | ||
| 650 | 0 | |a Amorphous semiconductors. | |
| 650 | 0 | |a Carbon compounds. | |
| 650 | 0 | |a Thin films. | |
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik. | |
| 856 | 4 | 1 | |u http://dspace.fsktm.um.edu.my/handle/1812/599 |
| 900 | |a HA-ZA | ||
| 596 | |a 1 | ||
| 999 | |a QC3 UMP 2008 ROZA |w LC |c 1 |i A513733140 |d 23/3/2010 |f 23/3/2010 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 22/3/2010 | ||