Lim, W. H. (2010). Optimization of inductively coupled plasma dry etching for planar waveguide fabrication.
Chicago Style (17th ed.) CitationLim, Weng Hong. Optimization of Inductively Coupled Plasma Dry Etching for Planar Waveguide Fabrication. 2010.
MLA引文Lim, Weng Hong. Optimization of Inductively Coupled Plasma Dry Etching for Planar Waveguide Fabrication. 2010.
警告:这些引文格式不一定是100%准确.