Characterization of an inductively coupled plasma produced in argon at 13.56 MHz /

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Bibliographic Details
Main Author: Lim, Ai Nuan
Format: Thesis Book
Language:English
Published: 2010.
Subjects:
Online Access:http://studentsrepo.um.edu.my/id/eprint/4309
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Description
Physical Description:xiv, 105 leaves : ill. ; 30 cm.
Bibliography:Bibliography: leaves 102-105.