Characterization of an inductively coupled plasma produced in argon at 13.56 MHz /
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Main Author: | |
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Format: | Thesis Book |
Language: | English |
Published: |
2010.
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Subjects: | |
Online Access: | http://studentsrepo.um.edu.my/id/eprint/4309 |
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001 | u796605 | ||
003 | SIRSI | ||
005 | 201008301237 | ||
008 | 100830s2010 my a t 000 0 eng m | ||
040 | |a UMM |d AUM |e rda | ||
090 | |a QC3 |b UM 2010 Lim | ||
100 | 1 | |a Lim, Ai Nuan. | |
245 | 1 | 0 | |a Characterization of an inductively coupled plasma produced in argon at 13.56 MHz / |c Lim Ai Nuan. |
260 | |c 2010. | ||
300 | |a xiv, 105 leaves : |b ill. ; |c 30 cm. | ||
502 | |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2010. | ||
504 | |a Bibliography: leaves 102-105. | ||
650 | 0 | |a Inductively coupled plasma mass spectrometry | |
650 | 0 | |a Argon plasmas. | |
650 | 0 | |a Plasma probes. | |
650 | 0 | |a Plasma frequencies. | |
650 | 0 | |a Langmuir probes. | |
710 | 2 | |a Universiti Malaya. |b Jabatan Fizik. | |
856 | 4 | 1 | |u http://studentsrepo.um.edu.my/id/eprint/4309 |
900 | |a ZSA | ||
596 | |a 1 25 | ||
999 | |a QC3 UM 2010 LIM |w LC |c 1 |i A514479381 |d 10/1/2011 |f 10/1/2011 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 10/1/2011 | ||
999 | |a QC3 UM 2010 LIM |w LC |c 1 |i A516260143 |l STACKS |m P25UMARCHI |r Y |s Y |t CD |u 9/7/2015 |1 STEM |