Characterization of an inductively coupled plasma produced in argon at 13.56 MHz /
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主要作者: | Lim, Ai Nuan |
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格式: | Thesis 圖書 |
語言: | English |
出版: |
2010.
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在線閱讀: | http://studentsrepo.um.edu.my/id/eprint/4309 |
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