Chuah, K. S. (2010). Inductively coupled plasma dry etching process on planar lightwave circuit fabrication.
Chicago Style (17th ed.) CitationChuah, Khoon Seah. Inductively Coupled Plasma Dry Etching Process on Planar Lightwave Circuit Fabrication. 2010.
MLA引文Chuah, Khoon Seah. Inductively Coupled Plasma Dry Etching Process on Planar Lightwave Circuit Fabrication. 2010.
警告：这些引文格式不一定是100％准确.