Inductively coupled plasma dry etching process on planar lightwave circuit fabrication /

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Bibliographic Details
Main Author: Chuah, Khoon Seah
Format: Thesis Book
Language:English
Published: 2010.
Subjects:
Online Access:http://studentsrepo.um.edu.my/id/eprint/4273
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100 1 |a Chuah, Khoon Seah. 
245 1 0 |a Inductively coupled plasma dry etching process on planar lightwave circuit fabrication /  |c Chuah Khoon Seah. 
260 |c 2010. 
300 |a x, 199 leaves :  |b ill. ;  |c 30 cm. 
502 |a Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2010. 
650 0 |a Plasma etching. 
650 0 |a Photonics. 
650 0 |a Wave guides. 
650 0 |a Optical fibers. 
650 0 |a Lithography. 
650 0 |a Photolithography. 
710 2 |a Universiti Malaya.  |b Jabatan Fizik. 
856 4 1 |u http://studentsrepo.um.edu.my/id/eprint/4273 
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