Computer simulation of laser annealing of silicon and aluminum /

Computer simulation of laser annealing of silicon and aluminum /

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Bibliographic Details
Main Author: Sin, Eak Hoa
Format: Thesis Book
Language:English
Published: 1987
Subjects:
Semiconductor industry > Laser use in > Simulation methods.
Silicon > Heat treatment > Simulation methods.
Aluminum > Heat treatment > Simulation methods.
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Description
Item Description:Photocopy.
Physical Description:viii, 140 leaves ; 29cm.
Bibliography:Bibliography: leaves 127-134.

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