Computer simulation of laser annealing of silicon and aluminum /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
1987
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| Subjects: | |
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| LEADER | 00890cam a2200253 4500 | ||
|---|---|---|---|
| 001 | u83471 | ||
| 003 | SIRSI | ||
| 008 | 890512s1987 si v 00 1 eng m | ||
| 035 | |a AAJ-0804 | ||
| 040 | |a UMM | ||
| 090 | |a TA1675 |b Sin | ||
| 100 | 1 | 0 | |a Sin, Eak Hoa. |
| 245 | 1 | 0 | |a Computer simulation of laser annealing of silicon and aluminum / |c by Sin Eak Hoa. |
| 260 | |c 1987 | ||
| 300 | |a viii, 140 leaves ; |c 29cm. | ||
| 500 | |a Photocopy. | ||
| 502 | |a Dissertation (M.Sc.) -- National University of Singapore, 1987. | ||
| 504 | |a Bibliography: leaves 127-134. | ||
| 650 | 0 | |a Semiconductor industry |x Laser use in |x Simulation methods. | |
| 650 | 0 | |a Silicon |x Heat treatment |x Simulation methods. | |
| 650 | 0 | |a Aluminum |x Heat treatment |x Simulation methods. | |
| 948 | |a 17/03/1991 |b 27/08/2002 | ||
| 596 | |a 1 | ||
| 999 | |a TA1675 SIN |w LC |c 1 |i A010557829 |d 17/10/1997 |l STACKS |m P01UTAMA |n 2 |r Y |s Y |t TESIS |u 19/2/1992 | ||