Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films /

Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films /

Saved in:
Bibliographic Details
Main Author: Goh, Boon Tong
Format: Thesis Book
Language:English
Published: 2012.
Subjects:
Thin films > Design and construction.
Plasma-enhanced chemical vapor deposition.
Silicon crystals.
Thin films > Optical properties.
Semiconductor films > Design and construction.
Online Access:http://studentsrepo.um.edu.my/id/eprint/3875
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Physical Description:[2] xx, 201 leaves : ill. ; 30 cm.
Bibliography:Bibliography: leaves 188-201.

Similar Items