http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films
Thesis (Ph.D) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2012.
Plasma-enhanced chemical vapor deposition