rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films
  name:
    name part: Goh, Boon Tong.
    role:
      role term: creator
  name:
    name part: Universiti Malaya
    name part: Jabatan Fizik.
  type of resource: text
  genre: technical report
  origin info:
    place:
      place term: my
    date issued: 2012
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: [2] xx, 201 leaves : ill. ; 30 cm.
  note: Goh Boon Tong.
  note: Thesis (Ph.D) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2012.
  note: Bibliography: leaves 188-201.
  subject:
    topic: Thin films
    topic: Design and construction
  subject:
    topic: Plasma-enhanced chemical vapor deposition
  subject:
    topic: Silicon crystals
  subject:
    topic: Thin films
    topic: Optical properties
  subject:
    topic: Semiconductor films
    topic: Design and construction
  identifier: http://studentsrepo.um.edu.my/id/eprint/3875
  related item:
    location:
      url: http://studentsrepo.um.edu.my/id/eprint/3875
  record info:
    record content source: UMM
    record creation date: 120322
    record change date: 201203221211
    record identifier: u853620