Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films /

Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films /

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书目详细资料
主要作者:	Goh, Boon Tong
格式:	Thesis 图书
语言:	English
出版:	2012.
主题:	Thin films > Design and construction. Plasma-enhanced chemical vapor deposition. Silicon crystals. Thin films > Optical properties. Semiconductor films > Design and construction.
在线阅读:	http://studentsrepo.um.edu.my/id/eprint/3875
标签:	添加标签没有标签, 成为第一个标记此记录!

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