Performance study of MEMS diaphragm for capacitive pressure sensor /

Performance study of MEMS diaphragm for capacitive pressure sensor /

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书目详细资料
主要作者:	Hasyireen Abdul Halim
格式:	Thesis 图书
语言:	English
出版:	2012.
主题:	Microelectromechanical systems. Microelectronics. Pressure transducers. Pressure > Measurement.
标签:	添加标签没有标签, 成为第一个标记此记录!

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