Advanced Process Control (APC) in back-end semiconductor manufacturing environment /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2013.
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| LEADER | 01217cam a2200277 a 4500 | ||
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| 001 | u887782 | ||
| 003 | SIRSI | ||
| 005 | 201309091030 | ||
| 008 | 130909s2013 my a t 000 0 eng m | ||
| 040 | |a UMM |d UMJ |e rda | ||
| 090 | |a TK7 |b UM 2013 Lim | ||
| 097 | |a TK7 |b UM 2013 Lim | ||
| 100 | 1 | |a Lim, Tian Siak. | |
| 245 | 1 | 0 | |a Advanced Process Control (APC) in back-end semiconductor manufacturing environment / |c Lim Tian Siak. |
| 260 | |c 2013. | ||
| 300 | |a xvi, 81 leaves : |b ill. ; |c 30 cm. | ||
| 502 | |a Dissertation (M.Eng.) -- Jabatan Kejuruteraan Elektrik, Fakulti Kejuruteraan, Universiti Malaya, 2013. | ||
| 504 | |a Bibliography: leaves 71-81. | ||
| 650 | 0 | |a Manufacturing processes |x Automation |v Case studies. | |
| 650 | 0 | |a Manufacturing processes |x Automatic control. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Kejuruteraan Elektrik. | |
| 900 | |a HA-ZA | ||
| 596 | |a 1 7 | ||
| 999 | |a TK7 UM 2013 LIM |w LC |c 1 |i A515605744 |d 16/4/2014 |f 16/4/2014 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 14/4/2014 | ||
| 999 | |a TK7 UM 2013 LIM |w LC |c 1 |i A516084815 |d 13/2/2015 |f 13/2/2015 |g 1 |l STACKS |m P07JURUTER |r N |s Y |t TESIS |u 13/2/2015 | ||
| 999 | |a TK7 UM 2013 LIM |w LC |c 2 |i A516150942 |d 13/2/2015 |f 13/2/2015 |g 1 |l COUNTER |m P07JURUTER |r N |s Y |t CD |u 13/2/2015 | ||