rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Advanced Process Control (APC) in back-end semiconductor manufacturing environment
  name:
    name part: Lim, Tian Siak.
    role:
      role term: creator
  name:
    name part: Universiti Malaya
    name part: Jabatan Kejuruteraan Elektrik.
  type of resource: text
  genre: technical report
  origin info:
    place:
      place term: my
    date issued: 2013
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xvi, 81 leaves : ill. ; 30 cm.
  note: Lim Tian Siak.
  note: Dissertation (M.Eng.) -- Jabatan Kejuruteraan Elektrik, Fakulti Kejuruteraan, Universiti Malaya, 2013.
  note: Bibliography: leaves 71-81.
  subject:
    topic: Manufacturing processes
    topic: Automation
    genre: Case studies
  subject:
    topic: Manufacturing processes
    topic: Automatic control
  record info:
    record content source: UMM
    record creation date: 130909
    record change date: 201309091030
    record identifier: u887782