Hybrid Plasma Enhanced Chemical Vapour Deposition/sputtering system for preparation of luminescent silicon carbon films /

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Bibliographic Details
Main Author: Nur Maisarah Abdul Rashid
Format: Thesis Book
Language:English
Published: 2013.
Subjects:
Online Access:http://studentsrepo.um.edu.my/id/eprint/4414
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Description
Physical Description:xv, 109 leaves : ill. ; 30 cm
Also issued in CD.
Bibliography:Bibliography: leaves 102-109