Hybrid Plasma Enhanced Chemical Vapour Deposition/sputtering system for preparation of luminescent silicon carbon films /
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Main Author: | Nur Maisarah Abdul Rashid |
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Format: | Thesis Book |
Language: | English |
Published: |
2013.
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Subjects: | |
Online Access: | http://studentsrepo.um.edu.my/id/eprint/4414 |
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