Design and analysis of MEMS capacitive accelerometer with optimized sensitivity /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2013.
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 01398cam a2200325 i 4500 | ||
|---|---|---|---|
| 001 | u990159 | ||
| 003 | SIRSI | ||
| 005 | 201402251549 | ||
| 008 | 140225s2013 my a t 000 0 eng m | ||
| 040 | |a UMM |u MJ |e rda | ||
| 090 | |a TK7 |b UM 2013 Khank | ||
| 097 | |a TK7 |b UM 2013 Khank | ||
| 100 | 0 | |a Khairun Nisa Khamil, |e author. | |
| 245 | 1 | 0 | |a Design and analysis of MEMS capacitive accelerometer with optimized sensitivity / |c Khairun Nisa bt Khamil |
| 264 | 1 | |c 2013. | |
| 264 | 4 | |c 2013. | |
| 300 | |a xii, 76 leaves : |b illustrations ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b M.Eng. |c Jabatan Kejuruteraan Elektrik, Fakulti Kejuruteraan, Universiti Malaya |d 2013. | ||
| 504 | |a Bibliography: leaves 69-72. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microelectromechanical systems |x Evaluation. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Kejuruteraan Elektrik, |e degree granting institution. | |
| 900 | |a MZAR-ZA | ||
| 596 | |a 1 7 | ||
| 999 | |a TK7 UM 2013 KHANK |w LC |c 1 |i A515968148 |d 10/11/2014 |f 10/11/2014 |g 1 |l STACKS |m P07JURUTER |r N |s Y |t TESIS |u 5/11/2014 | ||
| 999 | |a TK7 UM 2013 KHANK |w LC |c 2 |i A515968165 |d 10/11/2014 |f 10/11/2014 |g 1 |l COUNTER |m P07JURUTER |r N |s Y |t CD |u 5/11/2014 | ||
| 999 | |a TK7 UM 2013 KHANK |w LC |c 1 |i A515702026 |d 28/5/2017 |e 28/5/2017 |f 27/10/2015 |g 1 |l STACKS |m P01UTAMA |n 1 |r Y |s Y |t TESIS |u 20/10/2015 | ||