Modelling and simulation of magnetron sputtering process /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2014.
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| Subjects: | |
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| LEADER | 01430cam a2200349 i 4500 | ||
|---|---|---|---|
| 001 | u999179 | ||
| 003 | SIRSI | ||
| 005 | 201407111601 | ||
| 008 | 140711s2014 my a t 000 0 eng m | ||
| 040 | |a UMM |d UMJ |e rda | ||
| 090 | |a TJ7 |b UM 2014 Elf | ||
| 097 | |a TJ7 |b UM 2014 Elf | ||
| 100 | 1 | |a Elfiky, Mohammed Albahy Abdulhameed, |e author. | |
| 245 | 1 | 0 | |a Modelling and simulation of magnetron sputtering process / |c Mohammed Albahy Abdulhameed Elfiky |
| 264 | 1 | |c 2014. | |
| 264 | 4 | |c 2014. | |
| 300 | |a xi, 49 leaves : |b illustrations ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b M.Eng. |c Jabatan Kejuruteraan Mekanik, Fakulti Kejuruteraan, Universiti Malaya |d 2014. | ||
| 504 | |a Bibliography: leaves 46-49. | ||
| 650 | 0 | |a Magnetrons |x Simulation methods. | |
| 650 | 0 | |a Sputtering (Physics) |x Simulation methods. | |
| 650 | 0 | |a Computer simulation. | |
| 650 | 0 | |a Thin films. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Kejuruteraan Mekanik, |e degree granting institution. | |
| 900 | |a HA-ZA | ||
| 596 | |a 1 7 | ||
| 999 | |a TJ7 UM 2014 ELF |w LC |c 1 |i A515926369 |d 3/2/2016 |f 3/2/2016 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 22/1/2016 | ||
| 999 | |a TJ7 UM 2014 MOH |w LC |c 1 |i A515967244 |d 26/9/2014 |f 26/9/2014 |g 1 |l STACKS |m P07JURUTER |r N |s Y |t TESIS |u 14/8/2014 | ||
| 999 | |a TJ7 UM 2014 MOH |w LC |c 2 |i A515962485 |d 26/9/2014 |f 26/9/2014 |g 1 |l COUNTER |m P07JURUTER |r N |s Y |t CD |u 26/9/2014 | ||