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Plasma-enhanced chemical vapor deposition
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Amorphous semiconductors
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Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films /
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Goh, Boon Tong
Published 2012
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Hydrogenated amorphous silicon by pulsed plasma enhanced chemical vapour deposition technique /
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Goh, Boon Tong
Published 2005
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Institution
Universiti Malaya
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Goh, Boon Tong
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Universiti Malaya.
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Services hosted by the Perpustakaan Sultan Abdul Samad, Universiti Putra Malaysia with Cooperation MySyL Group
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