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  1. 1
    Hot-wire plasma enhanced chemical vapour deposition system for preparation of silicon carbide thin films /
    by Aniszawati Azis
    Published 2012
    Subjects: “...Silicon-carbide thin films....”
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    Thesis Book
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  2. 2
    Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases /
    by Tehrani, Fatemeh Shariatmadar
    Published 2013
    Subjects: “...Silicon-carbide thin films....”
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    Thesis Book
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