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  1. 1
    Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition /
    by Mohd Azam Abdul Rahman
    Published 2018
    Subjects: “...Thin films Optical properties....”
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    Thesis Book
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  2. 2
    Preparation and characterisation of hydrogenated R.F. sputtered amorphous silicon carbide films /
    by Loo, Fook Leong
    Published 1996
    Subjects: “...Silicon-carbide thin films Electric properties....”
    Thesis Book
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