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  1. 1
    Design, fabrication, and optimization of micromechanical flexures /
    by Cho, Young-Ho
    Published 1990
    Thesis Book
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  2. 2
    Micro accelerometer design with digital feedback control /
    by Lemkin, Mark Alan
    Published 1997
    Thesis Book
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  3. 3
    Differential capacitive MEMS accelerometer with non-crossing sensing element for airbag application /
    by Tamsir, Agus Santoso
    Published 2006
    Thesis Book
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  4. 4
    Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMs /
    by Norhayati Soin
    Published 2006
    Thesis Book
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  5. 5
    Rekabentuk kapasitor boleh laras mems bagi julat 250 fF hingga 1110 fF untuk applikasi RF /
    by Hasnizah Aris
    Published 2006
    Thesis Book
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  6. 6
    Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /
    by Muhammad Ramdzan Buyong
    Published 2010
    Thesis Book
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  7. 7
    Akselerometer kapasitif mems 10g pemesinanmikro pukal untuk aplikasi automotif /
    by Azrif Manut
    Published 2007
    Thesis Book
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  8. 8
    Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /
    by Mohd Ismahadi Syono
    Published 2008
    Thesis Book
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  9. 9
    Design and fabrication of MEMS transformers for radio frequency integrated circuit (RF-IC) applications /
    by Jumril Yunas
    Published 2008
    Thesis Book
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